This book serves as a guide for practicing engineers, researchers and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials. This book highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. The topics include fabrication of devices using biomaterials; biocompatible coatings and issues; thin-ftlm biomaterials and MEMS for tissue engineering; and applications involving MEMS and biomaterials.
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