PLASMA ETCHING
by SUGAWARA (9780198562870)

PLASMA ETCHING
 
SUGAWARA
Release Date: 01 May 1998
Format: Hardback
Pages: 360
Category: Plasma Physics
ISBN: 9780198562870
ISBN-10: 019856287X



The focus of this book is on the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

AUD $282.95

 This title is not held in stock & is ordered from suppliers, subject to availability.


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