Plasma-Surface Interactions of Advanced Photoresist Systems
by Sebastian Engelmann (9783639178241)

Plasma-Surface Interactions of Advanced Photoresist Systems
Sebastian Engelmann
Release Date: 01 September 2009
Format: Paperback
Pages: 172
Category: Engineering
Publisher: VDM Verlag
ISBN: 9783639178241
ISBN-10: 3639178246

Plasma based transfer of photoresist (PR) patterns using 193nm PR films usually suffer from high removal rates and excessive surface and line edge roughness. The effects of process time, PR material, bias and source power, pressure and gas chemistry were studied. Polymer destruction in the top surface, oxygen and hydrogen loss along with fluorination were observed for all materials initially, which was followed by steady state etch conditions. A strong dependence of plasma-induced surface chemical and morphological changes on polymer structure was observed. In particular, the adamantane group of 193 nm PR showed poor stability. Two linked mechanisms for the roughening behavior of the films during processing were identified: A physical pattern transfer mechanism enhances initial roughness by nonuniform removal. Additional to that, roughness formation occurred linear to the energy density deposited during processing.Even for various feedgas chemistries adamantyl containing polymers show enhanced roughening rates, suggesting that the instability of the adamantyl structure used in 193nm PR polymers is the performance limiting factor for processing PR materials.

AUD $152.95

 This title is not held in stock & is ordered from suppliers, subject to availability.

View other Sebastian Engelmann titles like "Plasma-Surface Interactions of Advanced Photoresist Systems"

Write a customer review of Plasma-Surface Interactions of Advanced Photoresist Systems.

If you like this title please tell others:

tell others

post to your Facebook wall post on Twitter post on Digg recommend to Stumbleupon bookmark on Delicious RSS feed send to a friend

Australian BookShop
Australian Bookshop. Established 2003
Shopping Cart Customer Support

International Online Store
of Inspiration
we ship everywhere
Australia Post
Australia Wide